Room temperature humidity sensors based on co-evaporated TeO2and Sn
نویسندگان
چکیده
منابع مشابه
Nanosized Thin SnO2 Layers Doped with Te and TeO2 as Room Temperature Humidity Sensors
In this paper the humidity sensing properties of layers prepared by a new method for obtaining doped tin oxide are studied. Different techniques-SEM, EDS in SEM, TEM, SAED, AES and electrical measurements-are used for detailed characterization of the thin layers. The as-deposited layers are amorphous with great specific area and low density. They are built up of a fine grained matrix, consistin...
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ژورنال
عنوان ژورنال: Journal of Physics: Conference Series
سال: 2012
ISSN: 1742-6596
DOI: 10.1088/1742-6596/356/1/012033